Silicon Investigations Vacuum Services




Vacuum System Expertise

Silicon Investigations has extensive vacuum system expertise in designing custom vacuum systems and process solutions for diverse scientific applications worldwide.  Our clientele include leading edge research facilities in both corporate and academic settings and semiconductor manufacturers.  Examples of some our more recent process solutions are given below.

  • Atomic Layer Deposition for Semiconductor Gate Oxide
  • Flat Panel Display Technology, Including Deposition Systems for Hafnium Oxide
  • Photovoltaic Solar Cell Panels, Including Multilevel Dopant Implantation
  • Optical Electronic Communications and Fiber Optic Solutions
  • Semiconductor Research, with a Focus on Emerging Technologies Including Graphene
  • Material Science, Including Metal/Ceramic Interfaces & Failure Analysis
  • Aerospace Research, Including UHV Processing and Testing
  • Specialized Biological Chambers and Instrumentation
  • Thermal Space Simulation
  • Laboratory Vacuum Equipment

Custom Vacuum Systems and Vacuum ComponentsAtomic Layer Deposition

  • Remote and Internal Manipulation Vacuum Chamber Designs
  • Thermal Evaporation Technology
  • Power and Temperature Controlled Environments
  • Electron Beam Heated Evaporation
  • RF Radio Frequency and Direct Current Magnetron Sputtering Systems
  • Ion Assisted Deposition Process
  • Laser Ablation and PLD Pulsed Laser Deposition Equipment
  • Atomic Layer Deposition Technology
  • Space Simulation Chambers and Temperature Controlled Environments
  • Reactive Ion Etching systems

Vacuum Sample Substrate Fixture Designs

  • Large Substrate Size and Irregular Sample Shape Capability
  • Heat Substrate Materials to 600° Celsius (1112° Fahrenheit)
  • Cool Substrate Materials with Liquid Nitrogen (LN2) to -196° Celsius (-321° Fahrenheit)
  • Cryostat Systems to cool samples to Below 2° K
  • Combine Sample Heating and Cooling Capabilities
  • UHV Sputtering Systems

  • Multiple Axis Linear Manipulation
  • Single Axis Source to Substrate Distance Adjustment
  • RF Radio Frequency and DC Direct Current Substrate Biasing


Vacuum Process Automation Control

  • PLC Programmable Logic Controller Vacuum System Automation
  • Automated Vacuum Sequences, Vacuum Pump Down, Venting, etc.
  • PC Personal Computer Interface for Advanced Vacuum Process Control
  • Automatic Deposition Processing, Data Logging for Multi Layer Vacuum Coatings


  • Silicon Investigative Services


Last updated: May 2, 2017

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