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Vacuum System Expertise
Silicon Investigations has extensive vacuum
system expertise in designing custom vacuum systems and process
solutions for diverse scientific applications worldwide. Our
clientele include leading edge research facilities in both corporate
and academic settings, semiconductor manufacturers and vacuum coating
companies. Examples of some our more recent process solutions are
given below.
- Atomic Layer Deposition for Gate Oxide
- Flat Panel Display Technology, Including
Deposition Systems for Hafnium Oxide
- Photovoltaic
Solar Cell Panels, Including Multilevel Dopant Implantation
- Optical Electronic Communications and
Fiber Optic Solutions
- Semiconductor Research, with a Focus on
Emerging Technologies
- Material Science, Including
Metal/Ceramic Interfaces & Failure Analysis
- Academic Research Program Support
- Aerospace Research, Including UHV
Processing and Testing
- Specialized Biological Chambers and
Instrumentation
- Thermal Space Simulation
- Laboratory Vacuum Equipment
You will find we are adaptable, responsive
and
price competitive in developing a vacuum solution to meet your needs.
Custom Vacuum Systems, Vacuum Components
- Remote and Internal Manipulation Vacuum
Chamber Designs
- Thermal Evaporation Technology
- Power and Temperature Controlled
Environments
- Electron Beam Heated Evaporation
- RF Radio Frequency and Direct Current
Magnetron Sputtering Systems
- Ion Assisted Deposition Process
- Laser Ablation and PLD Pulsed Laser
Deposition Equipment
- Atomic Layer Deposition Technology
- Space Simulation Chambers and
Temperature Controlled Environments
- Vacuum Furnace Engineering and Systems
Vacuum Sample Substrate Fixture Designs
- Large Substrate Size and Irregular
Sample Shape Capability
- Heat Substrate Materials to 600°
Celsius (1112° Fahrenheit)
- Cool Substrate Materials with Liquid
Nitrogen (LN2) to -196° Celsius (-321° Fahrenheit)
- Cryostat Systems to cool samples to
Below 2° K
- Combine Sample Heating and Cooling
Capabilities

- Multiple Axis Linear Manipulation
- Single Axis Source to Substrate Distance
Adjustment
- RF Radio Frequency and DC Direct Current
Substrate Biasing
Vacuum Process Automation Control
- PLC Programmable Logic Controller Vacuum
System Automation
- Automated Vacuum Sequences, Vacuum Pump
Down, Venting, etc.
- PC Personal Computer Interface for
Advanced Vacuum Process Control
- Automatic Deposition Processing, Data
Logging for Multi Layer Vacuum Coatings
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